Mouraille, O.: search on Z-Library

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1

Improving Equipment Defectivity Specifications Through Chip Yield Modeling: A Case Study for Immersion Lithography

Boogaard, Arjen, Smith, Ian, Mouraille, Orion, Knaapen, Thijs, Stegen, Raf

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2013

Language:

english

File:

PDF, 217 KB

english, 2013

2

SPIE Proceedings [SPIE 28th European Mask and Lithography Conference (EMLC 2012) - Dresden, Germany (Tuesday 17 January 2012)] 28th European Mask and Lithography Conference - PSM and thin OMOG reticles aerial imaging metrology comparison study

Cohen, Yaron, Finders, Jo, Mangan, Shmoolik, Englard, Ilan, Mouraille, Orion, Janssen, Maurice, Miyazaki, Junji, Connolly, Brid, Kojima, Yosuke, Higuchi, Masaru, Behringer, Uwe F.W., Maurer, Wilhelm

Year:

2012

Language:

english

File:

PDF, 2.45 MB

english, 2012

3

Étude de la santé mentale chez des enfants de 6–10 ans : comparaison entre 2 groupes issus de milieux scolaires et socioculturels différents

M Allès-Jardel, S Mouraille

Journal:

Neuropsychiatrie de l'Enfance et de l'Adolescence

Year:

2003

File:

PDF, 550 KB

2003

4

SPIE Proceedings [SPIE 28th European Mask and Lithography Conference (EMLC 2012) - Dresden, Germany (Tuesday 17 January 2012)] 28th European Mask and Lithography Conference - Investigation and mitigation of field-edge CDU fingerprint for ArFi lithography for 45-nm to sub-28-nm logic nodes

Le-Gratiet, Bertrand, Finders, Jo, Mouraille, Orion, Queens, Rene, Escalante, Maryana, Smeets, Bart, Beltman, Jan, Jullian, Karine, Behringer, Uwe F.W., Maurer, Wilhelm

Year:

2012

Language:

english

File:

PDF, 1.85 MB

english, 2012

5

SPIE Proceedings [SPIE 28th European Mask and Lithography Conference (EMLC 2012) - Dresden, Germany (Tuesday 17 January 2012)] 28th European Mask and Lithography Conference - Impact of reticle absorber on the imaging properties in ArFi lithography

Finders, Jo, Mouraille, O., Bouma, A., Ngai, A., Grim, K., van Praagh, J., Toma, C., Miyazaki, J., Higuchi, M., Kojima, Y., Connolly, B., Englard, I., Cohen, Y., Mangan, S., Ben Yishai, Michael, Julli

Year:

2012

Language:

english

File:

PDF, 758 KB

english, 2012

6

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Metrology, Inspection, and Process Control for Microlithography XXV - Towards 22 nm: fast and effective intra-field monitoring and optimization of process windows and CDU

Raymond, Christopher J., Cohen, Yaron, Finders, Jo, Knops, Roel, Mouraille, Orion, Minnaert-Janssen, Ingrid, Duray, Frank, Mos, Evert, Kremer, Alexander, Sagiv, Amir, Mangan, Shmoolik, Ben Yishay, Mic

Year:

2011

Language:

english

File:

PDF, 958 KB

english, 2011

7

Sound propagation in isotropically and uni-axially compressed cohesive, frictional granular solids

O. Mouraille, O. Herbst, S. Luding

Journal:

Engineering Fracture Mechanics

Year:

2009

Language:

english

File:

PDF, 827 KB

english, 2009

8

SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, California, USA (Tuesday 11 September 2012)] Photomask Technology 2012 - Impact of mask CDU and local CD variation on intra-field CDU

Miyazaki, Junji, Abboud, Frank E., Faure, Thomas B., Mouraille, Orion, Finders, Jo, Higuchi, Masaru, Kojima, Yosuke, Sato, Shunsuke, Morimoto, Hiroaki

Year:

2012

Language:

english

File:

PDF, 1.65 MB

english, 2012

9

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Optical Microlithography XXVII - Advanced OPC Mask-3D and Resist-3D modeling

Lai, Kafai, Erdmann, Andreas, Szucs, A., Planchot, J., Farys, V., Yesilada, E., Depre, L., Kapasi, S., Gourgon, C., Besacier, M., Mouraille, O., Driessen, F.

Year:

2014

Language:

english

File:

PDF, 983 KB

english, 2014

10

[Society of Petroleum Engineers SPE International Conference on Health, Safety, and Environment in Oil and Gas Exploration and Production - (1998.06.7-1998.06.10)] Proceedings of SPE International Conference on Health, Safety, and Environment in Oil and Gas Exploration and Production - Totally catalytic processing of H2S containing gas streams to get the 99.9% recovery performance

Savin, S., Mouraille, O., Nougayrede, J.

Year:

1998

Language:

english

File:

PDF, 77 KB

english, 1998

11

Sound wave propagation in weakly polydisperse granular materials

O. Mouraille, S. Luding

Journal:

Year:

2008

Language:

english

File:

PDF, 536 KB

english, 2008

12

STABILITY OF WATER-IN-CRUDE OIL EMULSIONS: ROLE PLAYED BY THE STATE OF SOLVATION OF ASPHALTENES AND BY WAXES

Mouraille, O., Skodvin, T., Sjöblom, J., Peytavy, J.-L

Journal:

Journal of Dispersion Science and Technology

Year:

1998

Language:

english

File:

PDF, 355 KB

english, 1998

13

SPIE Proceedings [SPIE SPIE Lithography Asia - Taipei, Taiwan (Wednesday 18 November 2009)] Lithography Asia 2009 - Litho scenario solutions for FinFET SRAM 22nm node

Tseng, Shih-En, Chen, Alek C., Han, Woo-Sung, Wu, Shun-Der, Wang, Jacques, Lin, Burn J., Yen, Anthony, Kou, Jay, Mouraille, Orion, Jungblut, Reiner, Chiou, Tsann-Bim, Finders, Jo, Chen, Alek, Dusa, Mi

Year:

2009

Language:

english

File:

PDF, 1.46 MB

english, 2009

14

Sound wave acceleration in granular materials

Mouraille, O, Mulder, W A, Luding, S

Journal:

Journal of Statistical Mechanics Theory and Experiment

Year:

2006

Language:

english

File:

PDF, 670 KB

english, 2006

15

[Society of Petroleum Engineers SPE International Conference on Health, Safety, and Environment in Oil and Gas Exploration and Production - Caracas, Venezuela (1998-06-07)] SPE International Conference on Health, Safety, and Environment in Oil and Gas Exploration and Production - Totally catalytic processing of H2S containing gas streams to get the 99.9% recovery performance

Savin, S., Mouraille, O., Nougayrede, J.

Language:

english

File:

PDF, 77 KB

english

16

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Metrology, Inspection, and Process Control for Microlithography XXVI - ArFi lithogrphy optimization for thin OMOG reticle with fast aerial imaging

Cohen, Yaron, Finders, Jo, Mangan, Shmoolik, Englard, Ilan, Mouraille, Orion, Janssen, Maurice, Miyazaki, Junji, Connolly, Brid, Kojima, Yosuke, Higuchi, Masaru, Starikov, Alexander

Year:

2012

Language:

english

File:

PDF, 2.56 MB

english, 2012

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